Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars

Conventional parallel capacitive RF MEMS switches have a large impact during the suction phase. In general, RF MEMS switches have to be switched on and off in a considerably fast manner. Increasing the driving voltage enables fast switching but also increases the impact force, which causes the beam...

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Detalles Bibliográficos
Autores principales: Feng, Hongbo, Zhao, Jiabin, Zhou, Chengsi, Song, Mingxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695471/
https://www.ncbi.nlm.nih.gov/pubmed/36433465
http://dx.doi.org/10.3390/s22228864

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695471/
https://www.ncbi.nlm.nih.gov/pubmed/36433465
http://dx.doi.org/10.3390/s22228864

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