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Design and Analysis of the Capacitive RF MEMS Switches with Support Pillars
Conventional parallel capacitive RF MEMS switches have a large impact during the suction phase. In general, RF MEMS switches have to be switched on and off in a considerably fast manner. Increasing the driving voltage enables fast switching but also increases the impact force, which causes the beam...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9695471/ https://www.ncbi.nlm.nih.gov/pubmed/36433465 http://dx.doi.org/10.3390/s22228864 |