Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory

In this paper, we present how complementary characterization techniques, such as electrical measurements with a vector network analyzer (VNA), optical measurements with a laser Doppler vibrometer (LDV), and numerical simulations with the finite element method, coupled with spectral domain analysis (...

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Detalles Bibliográficos
Autores principales: Smagin, Nikolay, Vanotti, Meddy, Duquennoy, Marc, Rousseau, Lionel, Alhousseini, Hassan, Blondeau-Patissier, Virginie, Ouaftouh, Mohammadi, Valbin, Laurie, Herth, Etienne
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9696398/
https://www.ncbi.nlm.nih.gov/pubmed/36433207
http://dx.doi.org/10.3390/s22228611

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