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Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array

Compared to conventional ultrasonic flowmeters using multiple transducers, this paper reports, for the first time, an airflow volumetric flowmeter using a signal PMUT array to measure the flow rate in a rectangular pipe. The PMUT around 200 kHz is selected to fit the system requirements. All PMUT el...

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Detalles Bibliográficos
Autores principales:	Xiu, Xueying, Yang, Haolin, Ji, Meilin, Lv, Haochen, Zhang, Songsong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9696614/ https://www.ncbi.nlm.nih.gov/pubmed/36422408 http://dx.doi.org/10.3390/mi13111979

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