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Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications

In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or three anchoring points, are designed and optimized to minimize membrane deformation due to residual fabrication stresses, thus exhibiting...

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Detalles Bibliográficos
Autores principales:	Casals-Terré, Jasmina, Pradell, Lluís, Heredia, Julio César, Giacomozzi, Flavio, Iannacci, Jacopo, Contreras, Adrián, Ribó, Miquel
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9697462/ https://www.ncbi.nlm.nih.gov/pubmed/36433499 http://dx.doi.org/10.3390/s22228893

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