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AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection

Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing. However, the sensing distance of currently reported miniaturized ultrasonic sensors (e.g., PMUTs or CMUT) is still limited up to a certain range (e.g., ≤5 m) compared to conventional bulk ultraso...

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Detalles Bibliográficos
Autores principales:	Yang, Haolin, Ji, Meilin, Xiu, Xueying, Lv, Haochen, Gu, Alex, Zhang, Songsong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9699016/ https://www.ncbi.nlm.nih.gov/pubmed/36363962 http://dx.doi.org/10.3390/mi13111942

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