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Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor (CMOS) compatible integration process. However, it is challenging for a traditional aluminum nitride (A...

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Detalles Bibliográficos
Autores principales:	Zou, Yang, Gao, Chao, Zhou, Jie, Liu, Yan, Xu, Qinwen, Qu, Yuanhang, Liu, WenJuan, Soon, Jeffrey Bo Woon, Cai, Yao, Sun, Chengliang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9705400/ https://www.ncbi.nlm.nih.gov/pubmed/36457715 http://dx.doi.org/10.1038/s41378-022-00457-0

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