Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

Laser-induced periodic surface structure (LIPSS), which has a period smaller than the laser wavelength, is expected to become a potential technique for fine surface processing. We report the microscopic and macroscopic observations of the crystallinity of LIPSSs, where the characteristics such as de...

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Detalles Bibliográficos
Autores principales: Miyagawa, Reina, Kamibayashi, Daisuke, Nakamura, Hirotaka, Hashida, Masaki, Zen, Heishun, Somekawa, Toshihiro, Matsuoka, Takeshi, Ogura, Hiroyuki, Sagae, Daisuke, Seto, Yusuke, Shobu, Takahisa, Tominaga, Aki, Eryu, Osamu, Ozaki, Norimasa
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9722692/
https://www.ncbi.nlm.nih.gov/pubmed/36470963
http://dx.doi.org/10.1038/s41598-022-25365-1

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