Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication

We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation. Spatially shaped fs laser-assisted chemical etchi...

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Detalles Bibliográficos
Autores principales: Yu, Jianping, Xu, Jian, Zhang, Aodong, Song, Yunpeng, Qi, Jia, Dong, Qiaonan, Chen, Jianfang, Liu, Zhaoxiang, Chen, Wei, Cheng, Ya
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9737694/
https://www.ncbi.nlm.nih.gov/pubmed/36502151
http://dx.doi.org/10.3390/s22239449

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