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Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation wi...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9738742/ https://www.ncbi.nlm.nih.gov/pubmed/36502191 http://dx.doi.org/10.3390/s22239490 |
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author | Kim, Kihyun Lee, Yeonsu Llamas-Garro, Ignacio Kim, Jung-Mu |
author_facet | Kim, Kihyun Lee, Yeonsu Llamas-Garro, Ignacio Kim, Jung-Mu |
author_sort | Kim, Kihyun |
collection | PubMed |
description | In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation without pull-in. The vertical MEMS actuator was fabricated using the SiOG (Silicon on Glass) process and the total actuator size was 8.3 mm × 8.3 mm. The fabricated proof mass was freestanding due to eight serpentine springs with 30 μm width. The vertical movement of the MEMS actuator was successfully controlled electrostatically. The measured vertical movement was 5.6 µm for a voltage of 40 V, applied between the top silicon structure and the hollow square electrode. The results shown here confirm that the proposed MEMS actuator was able to control the vertical displacement using an applied voltage. |
format | Online Article Text |
id | pubmed-9738742 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-97387422022-12-11 Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications Kim, Kihyun Lee, Yeonsu Llamas-Garro, Ignacio Kim, Jung-Mu Sensors (Basel) Article In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation without pull-in. The vertical MEMS actuator was fabricated using the SiOG (Silicon on Glass) process and the total actuator size was 8.3 mm × 8.3 mm. The fabricated proof mass was freestanding due to eight serpentine springs with 30 μm width. The vertical movement of the MEMS actuator was successfully controlled electrostatically. The measured vertical movement was 5.6 µm for a voltage of 40 V, applied between the top silicon structure and the hollow square electrode. The results shown here confirm that the proposed MEMS actuator was able to control the vertical displacement using an applied voltage. MDPI 2022-12-05 /pmc/articles/PMC9738742/ /pubmed/36502191 http://dx.doi.org/10.3390/s22239490 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Kim, Kihyun Lee, Yeonsu Llamas-Garro, Ignacio Kim, Jung-Mu Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications |
title | Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications |
title_full | Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications |
title_fullStr | Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications |
title_full_unstemmed | Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications |
title_short | Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications |
title_sort | fabrication of vertical mems actuator with hollow square electrode for spr sensing applications |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9738742/ https://www.ncbi.nlm.nih.gov/pubmed/36502191 http://dx.doi.org/10.3390/s22239490 |
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