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Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications

In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation wi...

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Detalles Bibliográficos
Autores principales: Kim, Kihyun, Lee, Yeonsu, Llamas-Garro, Ignacio, Kim, Jung-Mu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9738742/
https://www.ncbi.nlm.nih.gov/pubmed/36502191
http://dx.doi.org/10.3390/s22239490
_version_ 1784847624173518848
author Kim, Kihyun
Lee, Yeonsu
Llamas-Garro, Ignacio
Kim, Jung-Mu
author_facet Kim, Kihyun
Lee, Yeonsu
Llamas-Garro, Ignacio
Kim, Jung-Mu
author_sort Kim, Kihyun
collection PubMed
description In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation without pull-in. The vertical MEMS actuator was fabricated using the SiOG (Silicon on Glass) process and the total actuator size was 8.3 mm × 8.3 mm. The fabricated proof mass was freestanding due to eight serpentine springs with 30 μm width. The vertical movement of the MEMS actuator was successfully controlled electrostatically. The measured vertical movement was 5.6 µm for a voltage of 40 V, applied between the top silicon structure and the hollow square electrode. The results shown here confirm that the proposed MEMS actuator was able to control the vertical displacement using an applied voltage.
format Online
Article
Text
id pubmed-9738742
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-97387422022-12-11 Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications Kim, Kihyun Lee, Yeonsu Llamas-Garro, Ignacio Kim, Jung-Mu Sensors (Basel) Article In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation without pull-in. The vertical MEMS actuator was fabricated using the SiOG (Silicon on Glass) process and the total actuator size was 8.3 mm × 8.3 mm. The fabricated proof mass was freestanding due to eight serpentine springs with 30 μm width. The vertical movement of the MEMS actuator was successfully controlled electrostatically. The measured vertical movement was 5.6 µm for a voltage of 40 V, applied between the top silicon structure and the hollow square electrode. The results shown here confirm that the proposed MEMS actuator was able to control the vertical displacement using an applied voltage. MDPI 2022-12-05 /pmc/articles/PMC9738742/ /pubmed/36502191 http://dx.doi.org/10.3390/s22239490 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Kim, Kihyun
Lee, Yeonsu
Llamas-Garro, Ignacio
Kim, Jung-Mu
Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
title Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
title_full Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
title_fullStr Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
title_full_unstemmed Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
title_short Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
title_sort fabrication of vertical mems actuator with hollow square electrode for spr sensing applications
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9738742/
https://www.ncbi.nlm.nih.gov/pubmed/36502191
http://dx.doi.org/10.3390/s22239490
work_keys_str_mv AT kimkihyun fabricationofverticalmemsactuatorwithhollowsquareelectrodeforsprsensingapplications
AT leeyeonsu fabricationofverticalmemsactuatorwithhollowsquareelectrodeforsprsensingapplications
AT llamasgarroignacio fabricationofverticalmemsactuatorwithhollowsquareelectrodeforsprsensingapplications
AT kimjungmu fabricationofverticalmemsactuatorwithhollowsquareelectrodeforsprsensingapplications