Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications

In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation wi...

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Detalles Bibliográficos
Autores principales: Kim, Kihyun, Lee, Yeonsu, Llamas-Garro, Ignacio, Kim, Jung-Mu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9738742/
https://www.ncbi.nlm.nih.gov/pubmed/36502191
http://dx.doi.org/10.3390/s22239490

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9738742/
https://www.ncbi.nlm.nih.gov/pubmed/36502191
http://dx.doi.org/10.3390/s22239490

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