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Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
In this study, an electrostatically driven vertical MEMS actuator was designed using a hollow square electrode. To attain vertical actuation, a hollow square-shaped electrode was designed on the glass substrate. The silicon proof mass, containing a step, was utilized to realize analogue actuation wi...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9738742/ https://www.ncbi.nlm.nih.gov/pubmed/36502191 http://dx.doi.org/10.3390/s22239490 |