Extreme Ultraviolet Lighting Using Carbon Nanotube-Based Cold Cathode Electron Beam

Laser-based plasma studies that apply photons to extreme ultraviolet (EUV) generation are actively being conducted, and studies by direct electron irradiation on Sn for EUV lighting have rarely been attempted. Here, we demonstrate a novel method of EUV generation by irradiating Sn with electrons emi...

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Detalles Bibliográficos
Autores principales: Yoo, Sung Tae, Park, Kyu Chang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739857/
https://www.ncbi.nlm.nih.gov/pubmed/36500759
http://dx.doi.org/10.3390/nano12234134

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739857/
https://www.ncbi.nlm.nih.gov/pubmed/36500759
http://dx.doi.org/10.3390/nano12234134

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