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Extreme Ultraviolet Lighting Using Carbon Nanotube-Based Cold Cathode Electron Beam
Laser-based plasma studies that apply photons to extreme ultraviolet (EUV) generation are actively being conducted, and studies by direct electron irradiation on Sn for EUV lighting have rarely been attempted. Here, we demonstrate a novel method of EUV generation by irradiating Sn with electrons emi...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9739857/ https://www.ncbi.nlm.nih.gov/pubmed/36500759 http://dx.doi.org/10.3390/nano12234134 |