Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line

In this paper, we report on polarization combining two-dimensional grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk...

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Autores principales: Georgieva, Galina, Mai, Christian, Seiler, Pascal M., Peczek, Anna, Zimmermann, Lars
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Higher Education Press 2022
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9756206/
https://www.ncbi.nlm.nih.gov/pubmed/36637535
http://dx.doi.org/10.1007/s12200-022-00005-8
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author Georgieva, Galina
Mai, Christian
Seiler, Pascal M.
Peczek, Anna
Zimmermann, Lars
author_facet Georgieva, Galina
Mai, Christian
Seiler, Pascal M.
Peczek, Anna
Zimmermann, Lars
author_sort Georgieva, Galina
collection PubMed
description In this paper, we report on polarization combining two-dimensional grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk Si wafers. The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of − 5 dB with a wafer variation of ± 1.2 dB. Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated. GRAPHICAL ABSTRACT: [Image: see text]
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spelling pubmed-97562062023-01-06 Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line Georgieva, Galina Mai, Christian Seiler, Pascal M. Peczek, Anna Zimmermann, Lars Front Optoelectron Research Article In this paper, we report on polarization combining two-dimensional grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk Si wafers. The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of − 5 dB with a wafer variation of ± 1.2 dB. Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated. GRAPHICAL ABSTRACT: [Image: see text] Higher Education Press 2022-04-21 /pmc/articles/PMC9756206/ /pubmed/36637535 http://dx.doi.org/10.1007/s12200-022-00005-8 Text en © The Author(s) 2022 https://creativecommons.org/licenses/by/4.0/Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Research Article
Georgieva, Galina
Mai, Christian
Seiler, Pascal M.
Peczek, Anna
Zimmermann, Lars
Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
title Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
title_full Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
title_fullStr Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
title_full_unstemmed Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
title_short Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
title_sort dual-polarization multiplexing amorphous si:h grating couplers for silicon photonic transmitters in the photonic bicmos backend of line
topic Research Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9756206/
https://www.ncbi.nlm.nih.gov/pubmed/36637535
http://dx.doi.org/10.1007/s12200-022-00005-8
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