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Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible [Formula: see text]

Film bulk acoustic resonators (FBARs) with a desired effective electromechanical coupling coefficient ([Formula: see text]) are essential for designing filter devices. Using AlN/AlScN composite film with the adjustable thickness ratio can be a feasible approach to obtain the required [Formula: see t...

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Detalles Bibliográficos
Autores principales:	Nian, Laixia, Zou, Yang, Gao, Chao, Zhou, Yu, Fan, Yuchen, Wang, Jian, Liu, Wenjuan, Liu, Yan, Soon, Jeffrey Bowoon, Cai, Yao, Sun, Chengliang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9781223/ https://www.ncbi.nlm.nih.gov/pubmed/36557343 http://dx.doi.org/10.3390/mi13122044

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