Cargando…

Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method

Microcomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation s...

Descripción completa

Detalles Bibliográficos
Autores principales: Li, Dongjie, Wang, Mingrui, Rong, Weibin, Yang, Liu, Xu, Donghao, Zhang, Yu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782056/
https://www.ncbi.nlm.nih.gov/pubmed/36557450
http://dx.doi.org/10.3390/mi13122151
_version_ 1784857244718858240
author Li, Dongjie
Wang, Mingrui
Rong, Weibin
Yang, Liu
Xu, Donghao
Zhang, Yu
author_facet Li, Dongjie
Wang, Mingrui
Rong, Weibin
Yang, Liu
Xu, Donghao
Zhang, Yu
author_sort Li, Dongjie
collection PubMed
description Microcomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation space and complex application objects, and the manipulation efficiency is relatively low, which makes it difficult to industrialize these micromanipulating systems. To solve the above problems, this paper proposes an efficient metal MCM strategy based on the electrochemical method. To verify the feasibility and repeatability of the strategy, the finite element model (FEM) incorporating the hydrodynamic and electrochemical theories is used to calculate the local stress distribution of the contact position during the dynamic pick-up process. Based on the simulation results, we defined the relationship between the parameters, such as the optimal manipulating position and angle for picking, transferring and releasing. The failure behaviors of pick-up are built to realize the efficient three-dimensional manipulation of microcopper wire of 300 μm. By establishing a theoretical model and experimental verification, it was concluded that the middle point was the best manipulating position when picking up the microcopper wire, the most efficient picking angle was between 45 and 60 degrees for the pipette, and the average time was 480 s in three sets of picking–release manipulation experiments. This paper provides an achievable idea for different types of micro-object manipulations and promotes the rapid application of micromanipulation techniques in MEMSs.
format Online
Article
Text
id pubmed-9782056
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-97820562022-12-24 Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method Li, Dongjie Wang, Mingrui Rong, Weibin Yang, Liu Xu, Donghao Zhang, Yu Micromachines (Basel) Article Microcomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation space and complex application objects, and the manipulation efficiency is relatively low, which makes it difficult to industrialize these micromanipulating systems. To solve the above problems, this paper proposes an efficient metal MCM strategy based on the electrochemical method. To verify the feasibility and repeatability of the strategy, the finite element model (FEM) incorporating the hydrodynamic and electrochemical theories is used to calculate the local stress distribution of the contact position during the dynamic pick-up process. Based on the simulation results, we defined the relationship between the parameters, such as the optimal manipulating position and angle for picking, transferring and releasing. The failure behaviors of pick-up are built to realize the efficient three-dimensional manipulation of microcopper wire of 300 μm. By establishing a theoretical model and experimental verification, it was concluded that the middle point was the best manipulating position when picking up the microcopper wire, the most efficient picking angle was between 45 and 60 degrees for the pipette, and the average time was 480 s in three sets of picking–release manipulation experiments. This paper provides an achievable idea for different types of micro-object manipulations and promotes the rapid application of micromanipulation techniques in MEMSs. MDPI 2022-12-05 /pmc/articles/PMC9782056/ /pubmed/36557450 http://dx.doi.org/10.3390/mi13122151 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Li, Dongjie
Wang, Mingrui
Rong, Weibin
Yang, Liu
Xu, Donghao
Zhang, Yu
Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_full Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_fullStr Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_full_unstemmed Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_short Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_sort study on the manipulation strategy of metallic microstructures based on electrochemical-assisted method
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782056/
https://www.ncbi.nlm.nih.gov/pubmed/36557450
http://dx.doi.org/10.3390/mi13122151
work_keys_str_mv AT lidongjie studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT wangmingrui studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT rongweibin studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT yangliu studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT xudonghao studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT zhangyu studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod