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Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
Microcomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation s...
Autores principales: | Li, Dongjie, Wang, Mingrui, Rong, Weibin, Yang, Liu, Xu, Donghao, Zhang, Yu |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9782056/ https://www.ncbi.nlm.nih.gov/pubmed/36557450 http://dx.doi.org/10.3390/mi13122151 |
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