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First-Principles Molecular Dynamics Simulations on Water–Solid Interface Behavior of H(2)O-Based Atomic Layer Deposition of Zirconium Dioxide

As an important inorganic material, zirconium dioxide (ZrO(2)) has a wide range of applications in the fields of microelectronics, coating, catalysis and energy. Due to its high dielectric constant and thermodynamic stability, ZrO(2) can be used as dielectric material to replace traditional silicon...

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Detalles Bibliográficos
Autores principales:	Xu, Rui, Zhou, Zhongchao, Wang, Yingying, Xiao, Hongping, Xu, Lina, Ding, Yihong, Li, Xinhua, Li, Aidong, Fang, Guoyong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9783483/ https://www.ncbi.nlm.nih.gov/pubmed/36558215 http://dx.doi.org/10.3390/nano12244362

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