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The Design and Fabrication of a MEMS Electronic Calibration Chip

During the test of microelectromechanical system (MEMS) devices, calibration of test cables, loads and test instruments is an indispensable step. Calibration kits with high accuracy, great operability and small loss can reduce the systematic errors in the test process to the greatest extent and impr...

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Detalles Bibliográficos
Autores principales:	Wu, Qiannan, Chen, Yu, Cao, Qianlong, Zhao, Jingchao, Wang, Shanshan, Wang, Junqiang, Li, Mengwei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9784844/ https://www.ncbi.nlm.nih.gov/pubmed/36557437 http://dx.doi.org/10.3390/mi13122139

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