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Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections

This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc(0.2)Al(0.8)N) thin films, which are sandwiched among three m...

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Detalles Bibliográficos
Autores principales:	Ji, Meilin, Yang, Haolin, Zhou, Yongxin, Xiu, Xueying, Lv, Haochen, Zhang, Songsong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9785527/ https://www.ncbi.nlm.nih.gov/pubmed/36557559 http://dx.doi.org/10.3390/mi13122260

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