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Influencing Effects of Fabrication Errors on Performances of the Dielectric Metalens
Despite continuous developments of manufacturing technology for micro-devices and nano-devices, fabrication errors still exist during the manufacturing process. To reduce manufacturing costs and save time, it is necessary to analyze the effects of fabrication errors on the performances of micro-/nan...
Autores principales: | Xu, Guoqing, Kang, Qianlong, Fan, Xueqiang, Yang, Guanghui, Guo, Kai, Guo, Zhongyi |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9787511/ https://www.ncbi.nlm.nih.gov/pubmed/36557397 http://dx.doi.org/10.3390/mi13122098 |
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