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Bandwidth Optimization of MEMS Accelerometers in Fluid Medium Environment

There is a constraint between the dynamic range and the bandwidth of MEMS accelerometers. When the input acceleration is comparatively large, the squeeze film damping will increase dramatically with the increase in the oscillation amplitude, resulting in a decrease in bandwidth. Conventional models...

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Detalles Bibliográficos
Autores principales:	Xu, Xiang, Wu, Shuang, Fang, Weidong, Yu, Zhe, Jia, Zeyu, Wang, Xiaoxu, Bai, Jian, Lu, Qianbo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9787731/ https://www.ncbi.nlm.nih.gov/pubmed/36560223 http://dx.doi.org/10.3390/s22249855

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