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Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change

Self-calibration capabilities for flexible pressure sensors are greatly needed for fluid dynamic analysis, structure health monitoring and wearable sensing applications to compensate, in situ and in real time, for sensor drifts, nonlinearity effects, and hysteresis. Currently, very few self-calibrat...

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Detalles Bibliográficos
Autores principales:	Kang, Yuhong, Mouring, Scott, de Clerck, Albrey, Mao, Shuo, Ng, Wing, Ruan, Hang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9787870/ https://www.ncbi.nlm.nih.gov/pubmed/36560105 http://dx.doi.org/10.3390/s22249737

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