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Hybrid height and slope figuring method for grazing-incidence reflective optics

Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual...

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Autores principales: Wang, Tianyi, Huang, Lei, Ke, Xiaolong, Zhu, Yi, Choi, Heejoo, Pullen, Weslin, Negi, Vipender, Kim, Daewook, Idir, Mourad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9814051/
https://www.ncbi.nlm.nih.gov/pubmed/36601927
http://dx.doi.org/10.1107/S160057752201058X
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author Wang, Tianyi
Huang, Lei
Ke, Xiaolong
Zhu, Yi
Choi, Heejoo
Pullen, Weslin
Negi, Vipender
Kim, Daewook
Idir, Mourad
author_facet Wang, Tianyi
Huang, Lei
Ke, Xiaolong
Zhu, Yi
Choi, Heejoo
Pullen, Weslin
Negi, Vipender
Kim, Daewook
Idir, Mourad
author_sort Wang, Tianyi
collection PubMed
description Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual height and slope errors. However, all the surface figuring methods are height based, lacking the explicit control of surface slopes. Although our preliminary work demonstrated a one-dimensional (1D) slope-based figuring model, its 2D extension is not straightforward. In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x- and y-directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the proposed ideas.
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spelling pubmed-98140512023-01-09 Hybrid height and slope figuring method for grazing-incidence reflective optics Wang, Tianyi Huang, Lei Ke, Xiaolong Zhu, Yi Choi, Heejoo Pullen, Weslin Negi, Vipender Kim, Daewook Idir, Mourad J Synchrotron Radiat Research Papers Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual height and slope errors. However, all the surface figuring methods are height based, lacking the explicit control of surface slopes. Although our preliminary work demonstrated a one-dimensional (1D) slope-based figuring model, its 2D extension is not straightforward. In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x- and y-directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the proposed ideas. International Union of Crystallography 2023-01-01 /pmc/articles/PMC9814051/ /pubmed/36601927 http://dx.doi.org/10.1107/S160057752201058X Text en © Tianyi Wang et al. 2023 https://creativecommons.org/licenses/by/4.0/This is an open-access article distributed under the terms of the Creative Commons Attribution (CC-BY) Licence, which permits unrestricted use, distribution, and reproduction in any medium, provided the original authors and source are cited.
spellingShingle Research Papers
Wang, Tianyi
Huang, Lei
Ke, Xiaolong
Zhu, Yi
Choi, Heejoo
Pullen, Weslin
Negi, Vipender
Kim, Daewook
Idir, Mourad
Hybrid height and slope figuring method for grazing-incidence reflective optics
title Hybrid height and slope figuring method for grazing-incidence reflective optics
title_full Hybrid height and slope figuring method for grazing-incidence reflective optics
title_fullStr Hybrid height and slope figuring method for grazing-incidence reflective optics
title_full_unstemmed Hybrid height and slope figuring method for grazing-incidence reflective optics
title_short Hybrid height and slope figuring method for grazing-incidence reflective optics
title_sort hybrid height and slope figuring method for grazing-incidence reflective optics
topic Research Papers
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9814051/
https://www.ncbi.nlm.nih.gov/pubmed/36601927
http://dx.doi.org/10.1107/S160057752201058X
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