Cargando…
Hybrid height and slope figuring method for grazing-incidence reflective optics
Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual...
Autores principales: | , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
International Union of Crystallography
2023
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9814051/ https://www.ncbi.nlm.nih.gov/pubmed/36601927 http://dx.doi.org/10.1107/S160057752201058X |
_version_ | 1784864049775771648 |
---|---|
author | Wang, Tianyi Huang, Lei Ke, Xiaolong Zhu, Yi Choi, Heejoo Pullen, Weslin Negi, Vipender Kim, Daewook Idir, Mourad |
author_facet | Wang, Tianyi Huang, Lei Ke, Xiaolong Zhu, Yi Choi, Heejoo Pullen, Weslin Negi, Vipender Kim, Daewook Idir, Mourad |
author_sort | Wang, Tianyi |
collection | PubMed |
description | Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual height and slope errors. However, all the surface figuring methods are height based, lacking the explicit control of surface slopes. Although our preliminary work demonstrated a one-dimensional (1D) slope-based figuring model, its 2D extension is not straightforward. In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x- and y-directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the proposed ideas. |
format | Online Article Text |
id | pubmed-9814051 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | International Union of Crystallography |
record_format | MEDLINE/PubMed |
spelling | pubmed-98140512023-01-09 Hybrid height and slope figuring method for grazing-incidence reflective optics Wang, Tianyi Huang, Lei Ke, Xiaolong Zhu, Yi Choi, Heejoo Pullen, Weslin Negi, Vipender Kim, Daewook Idir, Mourad J Synchrotron Radiat Research Papers Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-electron laser facilities to transport and focus the emitted X-ray beams. To preserve the imaging capability at the diffraction limit, the fabrication of these optics requires precise control of both the residual height and slope errors. However, all the surface figuring methods are height based, lacking the explicit control of surface slopes. Although our preliminary work demonstrated a one-dimensional (1D) slope-based figuring model, its 2D extension is not straightforward. In this study, a novel 2D slope-based figuring method is proposed, which employs an alternating objective optimization on the slopes in the x- and y-directions directly. An analytical simulation revealed that the slope-based method achieved smaller residual slope errors than the height-based method, while the height-based method achieved smaller residual height errors than the slope-based method. Therefore, a hybrid height and slope figuring method was proposed to further enable explicit control of both the height and slopes according to the final mirror specifications. An experiment to finish an elliptical-cylindrical mirror using the hybrid method with ion beam figuring was then performed. Both the residual height and slope errors converged below the specified threshold values, which verified the feasibility and effectiveness of the proposed ideas. International Union of Crystallography 2023-01-01 /pmc/articles/PMC9814051/ /pubmed/36601927 http://dx.doi.org/10.1107/S160057752201058X Text en © Tianyi Wang et al. 2023 https://creativecommons.org/licenses/by/4.0/This is an open-access article distributed under the terms of the Creative Commons Attribution (CC-BY) Licence, which permits unrestricted use, distribution, and reproduction in any medium, provided the original authors and source are cited. |
spellingShingle | Research Papers Wang, Tianyi Huang, Lei Ke, Xiaolong Zhu, Yi Choi, Heejoo Pullen, Weslin Negi, Vipender Kim, Daewook Idir, Mourad Hybrid height and slope figuring method for grazing-incidence reflective optics |
title | Hybrid height and slope figuring method for grazing-incidence reflective optics |
title_full | Hybrid height and slope figuring method for grazing-incidence reflective optics |
title_fullStr | Hybrid height and slope figuring method for grazing-incidence reflective optics |
title_full_unstemmed | Hybrid height and slope figuring method for grazing-incidence reflective optics |
title_short | Hybrid height and slope figuring method for grazing-incidence reflective optics |
title_sort | hybrid height and slope figuring method for grazing-incidence reflective optics |
topic | Research Papers |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9814051/ https://www.ncbi.nlm.nih.gov/pubmed/36601927 http://dx.doi.org/10.1107/S160057752201058X |
work_keys_str_mv | AT wangtianyi hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics AT huanglei hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics AT kexiaolong hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics AT zhuyi hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics AT choiheejoo hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics AT pullenweslin hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics AT negivipender hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics AT kimdaewook hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics AT idirmourad hybridheightandslopefiguringmethodforgrazingincidencereflectiveoptics |