The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition

AlCrFeCoNiCu(0.5) thin films were fabricated by cathodic arc deposition under different substrate biases. Detailed characterization of the chemistry and structure of the film, from the substrate interface to the film surface, was achieved by combining high-resolution transmission electron microscopy...

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Autores principales: Zhao, Hong, Zheng, Zhong, Akhavan, Behnam, Tsoutas, Kostadinos, Sun, Lixian, Zhou, Haoruo, Bilek, Marcela M., Liu, Zongwen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9814579/
https://www.ncbi.nlm.nih.gov/pubmed/36604471
http://dx.doi.org/10.1038/s41598-022-26232-9
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author Zhao, Hong
Zheng, Zhong
Akhavan, Behnam
Tsoutas, Kostadinos
Sun, Lixian
Zhou, Haoruo
Bilek, Marcela M.
Liu, Zongwen
author_facet Zhao, Hong
Zheng, Zhong
Akhavan, Behnam
Tsoutas, Kostadinos
Sun, Lixian
Zhou, Haoruo
Bilek, Marcela M.
Liu, Zongwen
author_sort Zhao, Hong
collection PubMed
description AlCrFeCoNiCu(0.5) thin films were fabricated by cathodic arc deposition under different substrate biases. Detailed characterization of the chemistry and structure of the film, from the substrate interface to the film surface, was achieved by combining high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. Computer simulations using the transport of ions in matter model were applied to understand the ion surface interactions that revealed the key mechanism of the film growth. The final compositions of the films are significantly different from that of the target used. A trend of elemental segregation, which was more pronounced with higher ion kinetic energy, was observed. The XPS results reveal the formation of [Formula: see text] and [Formula: see text] on the thin film surface. The grain size is shown to increase with the increasing of the ion kinetic energy. The growth of equiaxed grains contributed to the formation of a flat surface with a relatively low surface roughness as shown by atomic force microscopy.
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spelling pubmed-98145792023-01-06 The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition Zhao, Hong Zheng, Zhong Akhavan, Behnam Tsoutas, Kostadinos Sun, Lixian Zhou, Haoruo Bilek, Marcela M. Liu, Zongwen Sci Rep Article AlCrFeCoNiCu(0.5) thin films were fabricated by cathodic arc deposition under different substrate biases. Detailed characterization of the chemistry and structure of the film, from the substrate interface to the film surface, was achieved by combining high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. Computer simulations using the transport of ions in matter model were applied to understand the ion surface interactions that revealed the key mechanism of the film growth. The final compositions of the films are significantly different from that of the target used. A trend of elemental segregation, which was more pronounced with higher ion kinetic energy, was observed. The XPS results reveal the formation of [Formula: see text] and [Formula: see text] on the thin film surface. The grain size is shown to increase with the increasing of the ion kinetic energy. The growth of equiaxed grains contributed to the formation of a flat surface with a relatively low surface roughness as shown by atomic force microscopy. Nature Publishing Group UK 2023-01-05 /pmc/articles/PMC9814579/ /pubmed/36604471 http://dx.doi.org/10.1038/s41598-022-26232-9 Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Zhao, Hong
Zheng, Zhong
Akhavan, Behnam
Tsoutas, Kostadinos
Sun, Lixian
Zhou, Haoruo
Bilek, Marcela M.
Liu, Zongwen
The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition
title The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition
title_full The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition
title_fullStr The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition
title_full_unstemmed The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition
title_short The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition
title_sort fabrication and growth mechanism of alcrfeconicu(0.5) hea thin films by substrate-biased cathodic arc deposition
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9814579/
https://www.ncbi.nlm.nih.gov/pubmed/36604471
http://dx.doi.org/10.1038/s41598-022-26232-9
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