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The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition
AlCrFeCoNiCu(0.5) thin films were fabricated by cathodic arc deposition under different substrate biases. Detailed characterization of the chemistry and structure of the film, from the substrate interface to the film surface, was achieved by combining high-resolution transmission electron microscopy...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9814579/ https://www.ncbi.nlm.nih.gov/pubmed/36604471 http://dx.doi.org/10.1038/s41598-022-26232-9 |