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The fabrication and growth mechanism of AlCrFeCoNiCu(0.5) HEA thin films by substrate-biased cathodic arc deposition

AlCrFeCoNiCu(0.5) thin films were fabricated by cathodic arc deposition under different substrate biases. Detailed characterization of the chemistry and structure of the film, from the substrate interface to the film surface, was achieved by combining high-resolution transmission electron microscopy...

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Detalles Bibliográficos
Autores principales:	Zhao, Hong, Zheng, Zhong, Akhavan, Behnam, Tsoutas, Kostadinos, Sun, Lixian, Zhou, Haoruo, Bilek, Marcela M., Liu, Zongwen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9814579/ https://www.ncbi.nlm.nih.gov/pubmed/36604471 http://dx.doi.org/10.1038/s41598-022-26232-9

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