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New achievement of the global sheath-bulk model for the collisionless radio-frequency using in scale industries
Plasma processing is extensively utilized in enormous industries products like semiconductor devices, textile fabrics, modifying polymers, and seed treatments. One of the most significant enhancements to this technology is the low pressure of capacitively coupled plasma (CCPs). Contrary to other pla...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9816976/ https://www.ncbi.nlm.nih.gov/pubmed/36619410 http://dx.doi.org/10.1016/j.heliyon.2022.e12264 |