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Formation and Properties of Thermistor Chips Based on Semiconductor 3D Metal Oxide Films Obtained by RF-Magnetron Sputtering

The formation of oxide semiconductor films of the (Mn,Co,Cu)(3)O(4) type by radio frequency magnetron sputtering is presented. The conditions of deposition and subsequent heat treatment make it possible to obtain films with electrophysical characteristics close to those of the bulk ceramic materials...

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Detalles Bibliográficos
Autores principales:	Novozhilov, Valery, Belov, Alexey
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9820983/ https://www.ncbi.nlm.nih.gov/pubmed/36614185 http://dx.doi.org/10.3390/ijms24010742

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