Numerical Analysis of the Effect of Retaining Ring Structure on the Chemical Mechanical Polishing Abrasive Motion State

Optimizing the retaining ring structure can improve the quality of Chemical Mechanical Polishing (CMP). This study establishes a two-dimensional Computational Fluid Dynamics-Discrete Element Method (CFD-DEM) model, while the model is validated by experiments. The results graphically demonstrate the...

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Detalles Bibliográficos
Autores principales: Zhang, Siqi, Liu, Yiran, Li, Weimin, Cao, Jun, Huang, Jiaye, Zhu, Lei, Guan, Zijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9821106/
https://www.ncbi.nlm.nih.gov/pubmed/36614398
http://dx.doi.org/10.3390/ma16010062

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9821106/
https://www.ncbi.nlm.nih.gov/pubmed/36614398
http://dx.doi.org/10.3390/ma16010062

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