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ITO Thin Films for Low-Resistance Gas Sensors

Indium tin oxide thin films were deposited by magnetron sputtering on ceramic aluminum nitride substrates and were annealed at temperatures of 500 °C and 600 °C. The structural, optical, electrically conductive and gas-sensitive properties of indium tin oxide thin films were studied. The possibility...

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Detalles Bibliográficos
Autores principales:	Almaev, Aleksei V., Kopyev, Viktor V., Novikov, Vadim A., Chikiryaka, Andrei V., Yakovlev, Nikita N., Usseinov, Abay B., Karipbayev, Zhakyp T., Akilbekov, Abdirash T., Koishybayeva, Zhanymgul K., Popov, Anatoli I.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9822304/ https://www.ncbi.nlm.nih.gov/pubmed/36614681 http://dx.doi.org/10.3390/ma16010342

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