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Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity

This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-dep...

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Autores principales: Cho, Chia-Yu, Chang, Jui-Chen, Cai, Min-Xian, Lin, Pei-Ting, Yang, Yao-Joe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823326/
https://www.ncbi.nlm.nih.gov/pubmed/36616531
http://dx.doi.org/10.3390/polym15010180
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author Cho, Chia-Yu
Chang, Jui-Chen
Cai, Min-Xian
Lin, Pei-Ting
Yang, Yao-Joe
author_facet Cho, Chia-Yu
Chang, Jui-Chen
Cai, Min-Xian
Lin, Pei-Ting
Yang, Yao-Joe
author_sort Cho, Chia-Yu
collection PubMed
description This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-deposited metal film into randomly distributed islands. The NPA properties, such as the mean particle size and the spacing between adjacent particles, can be easily tailored by controlling the dewetting temperature, as well as the as-deposited metal-film thickness. The fabricated NPAs were employed to develop gauge pressure sensors with high sensitivity. The proposed sensor consists of a sealed reference-pressure cavity, a polyimide (PI) membrane patterned with an interdigital electrode pair (IEP), and a silver NPA deposited on the IEP and the PI membrane. The operational principle of the device is based on the NPA percolation effect with deformation-dependence. The fabricated sensors exhibit rapid responses and excellent linearity at around 1 atm. The maximum sensitivity is about 0.1 kPa(−1). The advantages of the proposed devices include ultrahigh sensitivity, a reduced thermal disturbance, and a decreased power consumption. A practical application of this pressure sensor with high resolution was demonstrated by using it to measure the relative floor height of a building.
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spelling pubmed-98233262023-01-08 Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity Cho, Chia-Yu Chang, Jui-Chen Cai, Min-Xian Lin, Pei-Ting Yang, Yao-Joe Polymers (Basel) Article This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-deposited metal film into randomly distributed islands. The NPA properties, such as the mean particle size and the spacing between adjacent particles, can be easily tailored by controlling the dewetting temperature, as well as the as-deposited metal-film thickness. The fabricated NPAs were employed to develop gauge pressure sensors with high sensitivity. The proposed sensor consists of a sealed reference-pressure cavity, a polyimide (PI) membrane patterned with an interdigital electrode pair (IEP), and a silver NPA deposited on the IEP and the PI membrane. The operational principle of the device is based on the NPA percolation effect with deformation-dependence. The fabricated sensors exhibit rapid responses and excellent linearity at around 1 atm. The maximum sensitivity is about 0.1 kPa(−1). The advantages of the proposed devices include ultrahigh sensitivity, a reduced thermal disturbance, and a decreased power consumption. A practical application of this pressure sensor with high resolution was demonstrated by using it to measure the relative floor height of a building. MDPI 2022-12-30 /pmc/articles/PMC9823326/ /pubmed/36616531 http://dx.doi.org/10.3390/polym15010180 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Cho, Chia-Yu
Chang, Jui-Chen
Cai, Min-Xian
Lin, Pei-Ting
Yang, Yao-Joe
Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity
title Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity
title_full Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity
title_fullStr Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity
title_full_unstemmed Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity
title_short Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity
title_sort dewetting process of silver thin films and its application on percolative pressure sensors with high sensitivity
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9823326/
https://www.ncbi.nlm.nih.gov/pubmed/36616531
http://dx.doi.org/10.3390/polym15010180
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