High-fidelity and clean nanotransfer lithography using structure-embedded and electrostatic-adhesive carriers

Metallic nanostructures are becoming increasingly important for both fundamental research and practical devices. Many emerging applications employing metallic nanostructures often involve unconventional substrates that are flexible or nonplanar, making direct lithographic fabrication very difficult....

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Detalles Bibliográficos
Autores principales: Gan, Zhuofei, Cai, Jingxuan, Sun, Zhao, Chen, Liyang, Sun, Chuying, Yu, Junyi, Liang, Zeyu, Min, Siyi, Han, Fei, Liu, Yu, Cheng, Xing, Yu, Shuhui, Cui, Dehu, Li, Wen-Di
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9829746/
https://www.ncbi.nlm.nih.gov/pubmed/36636368
http://dx.doi.org/10.1038/s41378-022-00476-x

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