Thermoelastic damping in MEMS gyroscopes at high frequencies

Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g., in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high freq...

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Detalles Bibliográficos
Autores principales: Schiwietz, Daniel, Weig, Eva M., Degenfeld-Schonburg, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9842615/
https://www.ncbi.nlm.nih.gov/pubmed/36660447
http://dx.doi.org/10.1038/s41378-022-00480-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9842615/
https://www.ncbi.nlm.nih.gov/pubmed/36660447
http://dx.doi.org/10.1038/s41378-022-00480-1

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