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Thermoelastic damping in MEMS gyroscopes at high frequencies
Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g., in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high freq...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9842615/ https://www.ncbi.nlm.nih.gov/pubmed/36660447 http://dx.doi.org/10.1038/s41378-022-00480-1 |