Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation

Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the system sensitivity performance. The Frequency modulation (FM) method is proposed as an ideal solution to solve the problem of environmental fluctuation stability. The effect of electrostatic force nonlinearity...

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Detalles Bibliográficos
Autores principales: Zhang, Kunpeng, Xie, Jianwei, Hao, Shuying, Zhang, Qichang, Feng, Jingjing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861521/
https://www.ncbi.nlm.nih.gov/pubmed/36677272
http://dx.doi.org/10.3390/mi14010211

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861521/
https://www.ncbi.nlm.nih.gov/pubmed/36677272
http://dx.doi.org/10.3390/mi14010211

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