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Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation
Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the system sensitivity performance. The Frequency modulation (FM) method is proposed as an ideal solution to solve the problem of environmental fluctuation stability. The effect of electrostatic force nonlinearity...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861521/ https://www.ncbi.nlm.nih.gov/pubmed/36677272 http://dx.doi.org/10.3390/mi14010211 |