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Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor

This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD...

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Detalles Bibliográficos
Autores principales: Satoh, Hiroaki, Isogai, Koki, Iwata, Shohei, Aso, Taiki, Hayashi, Ryosuke, Takeuchi, Shu, Inokawa, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861696/
https://www.ncbi.nlm.nih.gov/pubmed/36679364
http://dx.doi.org/10.3390/s23020568
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author Satoh, Hiroaki
Isogai, Koki
Iwata, Shohei
Aso, Taiki
Hayashi, Ryosuke
Takeuchi, Shu
Inokawa, Hiroshi
author_facet Satoh, Hiroaki
Isogai, Koki
Iwata, Shohei
Aso, Taiki
Hayashi, Ryosuke
Takeuchi, Shu
Inokawa, Hiroshi
author_sort Satoh, Hiroaki
collection PubMed
description This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD is satisfied, we observe sharp peaks in the spectroscopic light sensitivity. Since the peak wavelength depends on the RI change around the SP antenna corresponding to the phase-matching condition, the SOI PDs with an SP antenna can be applied to the optical biosensor. The RI detection limit is evaluated in the measurements with bulk solutions, and 1.11 × 10(−5) RIU (refractive index unit) can be obtained, which is comparable to that of a surface plasmon resonance (SPR) sensor, which is well known as a representative optical biosensor. In addition, the response for intermolecular bonds is estimated by the electromagnetic simulations using the finite-difference time-domain (FDTD) method to clarify its ability to detect biomolecular interactions. The results of this paper will provide new ground for high-throughput label-free biosensing, since a large number of SOI PDs with an SP antenna can be easily integrated on a single chip via an SOI complementary metal-oxide-semiconductor (CMOS) fabrication process.
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spelling pubmed-98616962023-01-22 Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor Satoh, Hiroaki Isogai, Koki Iwata, Shohei Aso, Taiki Hayashi, Ryosuke Takeuchi, Shu Inokawa, Hiroshi Sensors (Basel) Article This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD is satisfied, we observe sharp peaks in the spectroscopic light sensitivity. Since the peak wavelength depends on the RI change around the SP antenna corresponding to the phase-matching condition, the SOI PDs with an SP antenna can be applied to the optical biosensor. The RI detection limit is evaluated in the measurements with bulk solutions, and 1.11 × 10(−5) RIU (refractive index unit) can be obtained, which is comparable to that of a surface plasmon resonance (SPR) sensor, which is well known as a representative optical biosensor. In addition, the response for intermolecular bonds is estimated by the electromagnetic simulations using the finite-difference time-domain (FDTD) method to clarify its ability to detect biomolecular interactions. The results of this paper will provide new ground for high-throughput label-free biosensing, since a large number of SOI PDs with an SP antenna can be easily integrated on a single chip via an SOI complementary metal-oxide-semiconductor (CMOS) fabrication process. MDPI 2023-01-04 /pmc/articles/PMC9861696/ /pubmed/36679364 http://dx.doi.org/10.3390/s23020568 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Satoh, Hiroaki
Isogai, Koki
Iwata, Shohei
Aso, Taiki
Hayashi, Ryosuke
Takeuchi, Shu
Inokawa, Hiroshi
Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_full Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_fullStr Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_full_unstemmed Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_short Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor
title_sort refractive index measurement using soi photodiode with sp antenna toward soi cmos-compatible integrated optical biosensor
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861696/
https://www.ncbi.nlm.nih.gov/pubmed/36679364
http://dx.doi.org/10.3390/s23020568
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