Refractive Index Measurement Using SOI Photodiode with SP Antenna toward SOI CMOS-Compatible Integrated Optical Biosensor

This paper proposes a new optical biosensor composed of a silicon-on-insulator (SOI) p–n junction photodiode (PD) with a surface plasmon (SP) antenna. When the phase-matching condition between two lateral wavelengths of the diffracted light from the SP antenna and the waveguiding mode in the SOI PD...

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Detalles Bibliográficos
Autores principales: Satoh, Hiroaki, Isogai, Koki, Iwata, Shohei, Aso, Taiki, Hayashi, Ryosuke, Takeuchi, Shu, Inokawa, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861696/
https://www.ncbi.nlm.nih.gov/pubmed/36679364
http://dx.doi.org/10.3390/s23020568

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