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Determination of the Dielectric Constant of Niobium Oxide by Using Combined EIS and Ellipsometric Methods

Combining ellipsometric and EIS methods, the dielectric constant ε for the oxide Nb(2)O(5) at room temperature was determined. At first, the linear dependence between anodization voltage and oxide thickness was established in the form d = 2.14 (± 0.05) · U + 12.2 (± 1.7) nm in the range of anodizing...

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Autores principales: Fitzner, Krzysztof, Stępień, Michał
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861748/
https://www.ncbi.nlm.nih.gov/pubmed/36676533
http://dx.doi.org/10.3390/ma16020798
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author Fitzner, Krzysztof
Stępień, Michał
author_facet Fitzner, Krzysztof
Stępień, Michał
author_sort Fitzner, Krzysztof
collection PubMed
description Combining ellipsometric and EIS methods, the dielectric constant ε for the oxide Nb(2)O(5) at room temperature was determined. At first, the linear dependence between anodization voltage and oxide thickness was established in the form d = 2.14 (± 0.05) · U + 12.2 (± 1.7) nm in the range of anodizing potentials 0–50 V. Next, assuming the equivalent circuit corresponds to one, the capacitance C of the dense oxide layer was measured. All results taken together gave the value of dielectric constant ε = 93 ± 5.
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spelling pubmed-98617482023-01-22 Determination of the Dielectric Constant of Niobium Oxide by Using Combined EIS and Ellipsometric Methods Fitzner, Krzysztof Stępień, Michał Materials (Basel) Article Combining ellipsometric and EIS methods, the dielectric constant ε for the oxide Nb(2)O(5) at room temperature was determined. At first, the linear dependence between anodization voltage and oxide thickness was established in the form d = 2.14 (± 0.05) · U + 12.2 (± 1.7) nm in the range of anodizing potentials 0–50 V. Next, assuming the equivalent circuit corresponds to one, the capacitance C of the dense oxide layer was measured. All results taken together gave the value of dielectric constant ε = 93 ± 5. MDPI 2023-01-13 /pmc/articles/PMC9861748/ /pubmed/36676533 http://dx.doi.org/10.3390/ma16020798 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Fitzner, Krzysztof
Stępień, Michał
Determination of the Dielectric Constant of Niobium Oxide by Using Combined EIS and Ellipsometric Methods
title Determination of the Dielectric Constant of Niobium Oxide by Using Combined EIS and Ellipsometric Methods
title_full Determination of the Dielectric Constant of Niobium Oxide by Using Combined EIS and Ellipsometric Methods
title_fullStr Determination of the Dielectric Constant of Niobium Oxide by Using Combined EIS and Ellipsometric Methods
title_full_unstemmed Determination of the Dielectric Constant of Niobium Oxide by Using Combined EIS and Ellipsometric Methods
title_short Determination of the Dielectric Constant of Niobium Oxide by Using Combined EIS and Ellipsometric Methods
title_sort determination of the dielectric constant of niobium oxide by using combined eis and ellipsometric methods
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861748/
https://www.ncbi.nlm.nih.gov/pubmed/36676533
http://dx.doi.org/10.3390/ma16020798
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