Top-down Determination of Fluctuations in Topographic Measurements

A top-down method is presented and studied for quantifying topographic map height (z) fluctuations directly from measurements on surfaces of interest. Contrary to bottom-up methods used in dimensional metrology, this method does not require knowledge of transfer functions and fluctuations of an inst...

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Detalles Bibliográficos
Autores principales: Lemesle, Julie, Moreau, Clement, Deltombe, Raphael, Blateyron, François, Martin, Joseph, Bigerelle, Maxence, Brown, Christopher A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861970/
https://www.ncbi.nlm.nih.gov/pubmed/36676212
http://dx.doi.org/10.3390/ma16020473

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9861970/
https://www.ncbi.nlm.nih.gov/pubmed/36676212
http://dx.doi.org/10.3390/ma16020473

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