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A Study on the Control Method of 6-DOF Magnetic Levitation System Using Non-Contact Position Sensors
Recently, due to the development of semiconductor technology, high-performance memory and digital convergence technology that integrates and implements various functions into one semiconductor chip has been regarded as the next-generation core technology. In the semiconductor manufacturing process,...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9862467/ https://www.ncbi.nlm.nih.gov/pubmed/36679695 http://dx.doi.org/10.3390/s23020905 |