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Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers
The measurements of wafers’ surface profile are crucial for safeguarding the fabrication quality of integrated circuits and MEMS devices. The current techniques measure the profile mainly by moving a capacitive or optical spacing sensing probe along multiple lines, which is high-cost and inefficient...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9863230/ https://www.ncbi.nlm.nih.gov/pubmed/36677183 http://dx.doi.org/10.3390/mi14010122 |