Reactive HiTUS TiNbVTaZrHf-N(x) Coatings: Structure, Composition and Mechanical Properties

High entropy metal sub-lattice stabilized nitride coatings based on multicomponent refractory transition metals (TM = Ti, Nb, V, Ta, Zr, Hf) are promising candidates for extreme conditions due to their high thermal, mechanical, and corrosion properties. The aims of the current work included the investigations of the possibilities of the novel High Target Utilization Sputtering (HiTUS) technique applied to reactive sputtering of TiNbVTaZrHf–xN coatings from the viewpoints of hysteresis behavior during reactive sputtering as well as the structure, composition, stoichiometry, and mechanical properties of the resulting coatings. With increasing nitrogen content, coating structures varied from amorphous in metallic alloy coatings to textured nano-columnar fcc structures. Despite certain deviations of TM from equiatomic concentrations, homogeneous solid solutions corresponding to single-phase multicomponent nitride analogous to high entropy stabilized compounds were obtained. Mechanical properties were found to be proportional to nitrogen content. The highest hardness H(IT) ~ 33 GPa and indentation modulus E(IT) ~ 400 GPa were found in a slightly sub-stoichiometric (~42 at% nitrogen) composition. H(IT)/E(IT) and limited pillar split measurements suggested that these coatings exhibit low fracture toughness (around 1 MPa.m(1/2)). The work confirmed that reactive HiTUS is suitable for the preparation of multicomponent nitrides with the control of their stoichiometry and mechanical properties only via nitrogen additions.