Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator

The arrival of the 5G era has promoted the need for filters of different bandwidths. Thin-film bulk acoustic resonators have become the mainstream product for applications due to their excellent performance. The K(eff)(2) of the FBAR greatly influences the bandwidth of the filter. In this paper, we...

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Detalles Bibliográficos
Autores principales: Qu, Yuanhang, Luo, Tiancheng, Wen, Zhiwei, Wei, Min, Gu, Xiyu, Chen, Xiang, Zou, Yang, Cai, Yao, Liu, Yan, Sun, Chengliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9864677/
https://www.ncbi.nlm.nih.gov/pubmed/36677218
http://dx.doi.org/10.3390/mi14010157

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