Cargando…
High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps
In this study, we design a highly efficient plasma source using a magnetic mirror trap with two opposing permanent magnets for a miniature high-efficiency ion pump. First, we simulated the distribution of the magnetic field line formed by the proposed magnetic mirror configuration. By optimizing the...
Autores principales: | Kurashima, Yuichi, Motomura, Taisei, Yanagimachi, Shinya, Matsumae, Takashi, Watanabe, Mitsuhiro, Takagi, Hideki |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9865766/ https://www.ncbi.nlm.nih.gov/pubmed/36679836 http://dx.doi.org/10.3390/s23021040 |
Ejemplares similares
-
Low-temperature direct bonding of InP and diamond substrates under atmospheric conditions
por: Matsumae, Takashi, et al.
Publicado: (2021) -
Comparison of Argon and Oxygen Plasma Treatments for Ambient Room-Temperature Wafer-Scale Au–Au Bonding Using Ultrathin Au Films
por: Yamamoto, Michitaka, et al.
Publicado: (2019) -
Bonding formation and gas absorption using Au/Pt/Ti layers for vacuum packaging
por: Kariya, Shingo, et al.
Publicado: (2022) -
Effect of Au Film Thickness and Surface Roughness on Room-Temperature Wafer Bonding and Wafer-Scale Vacuum Sealing by Au-Au Surface Activated Bonding
por: Yamamoto, Michitaka, et al.
Publicado: (2020) -
Wafer-Scale Room-Temperature Bonding of Smooth Au/Ti-Based Getter Layer for Vacuum Packaging
por: Matsumae, Takashi, et al.
Publicado: (2022)