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Microfluidic Chip Fabrication of Fused Silica Using Microgrinding
Although glass is in high demand as a material for microfluidic chips, it is still difficult to fabricate microstructures on glass. In this paper, polycrystalline diamond tools were fabricated through electrical discharge machining, and the microgrinding process for fused silica using the tools was...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9865910/ https://www.ncbi.nlm.nih.gov/pubmed/36677156 http://dx.doi.org/10.3390/mi14010096 |