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Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer
In this paper, we demonstrate a novel photonic integrated accelerometer based on the optical mode localization sensing mechanism, which is designed on an SOI wafer with a device layer thickness of 220 nm. High sensitivity and large measurement range can be achieved by integrating coupled ring resona...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9866453/ https://www.ncbi.nlm.nih.gov/pubmed/36677100 http://dx.doi.org/10.3390/mi14010039 |