Design and Development of a MOEMS Accelerometer Using SOI Technology

The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the design, fabrication, and characterizat...

Descripción completa

Detalles Bibliográficos
Autores principales: Mireles, José, Sauceda, Ángel, Jiménez, Abimael, Ramos, Manuel, Gonzalez-Landaeta, Rafael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9867042/
https://www.ncbi.nlm.nih.gov/pubmed/36677292
http://dx.doi.org/10.3390/mi14010231

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9867042/
https://www.ncbi.nlm.nih.gov/pubmed/36677292
http://dx.doi.org/10.3390/mi14010231

Ejemplares similares